The CREM technique is a novel development focusing on the derivation of electrical properties, directly from the XPS data.
CREM modes & applications already demonstrated include:
- I-V curves of selected regions within heterostructures
- Characterization of the electric breakdown channels in dielectric spacers
- Gate oxide quality & hot-e- characteristics
- A novel spectroscopy of charge traps in wide bandgap materials
- Work function measurements in non-uniform systems
- Photo-voltaic measurements at selected regions
- Measuring internal fields and constructing ‘correct’ band diagrams of devices
- Pyro-electricity - a unique non-contact approach to
- Capacitance and charge capturing characterization
- Applications to organic and bio molecules – approaching atomic scale resolution
- Nano scale electron transport characteristics
- Non-damaging depth profiling (towards 3D- imaging capabilities)