Nanofabrication

Unit path
nanofabrication

Patterning

E-Beam writer RAITH E_Line Plus Electron Beam Lithography

Patterning

Angstrom Organic Evaporator

Additive processes

Microfluidics

AFM/SPM Dimension Edge

Inspection & Metrology

Optical stereo microscope Olympus SZX16

Inspection & Metrology

Inspection & Metrology

Packaging and assembly

Thermal