Foundry

Israel Quantum Diamond Foundry (co-funded by PBC, Weizmann, HUJI, BIU and Technion)

Single-crystal diamond CVD

This is a Seki SDS 6380 (5 kW) with two interchangeable stages for fast growth and δ-doped slow growth.

single crystal growth of diamond — growth of a single-crystal diamond

overview of the CVD system — CVD machine overview

Laser cutting and sawing

The original cutting and sawing tool from Sarine, the Quazer-3 can cut the diamond substrate to different pieces, make thin slices and remove the as-grown material from the seed.

Quazer-3 laser cutting and sawing - inside look

Mechanical and chemical-mechanical polishing

For mechanical polishing we use a 3000 RPM skive from Dialit and Coborn. The chemical-mechanical polishing tool came all the way from distant Scotland.

Logitech PM6 for chemical mechanical polishing — Logitech PM-6 for CMP

Thermal annealing

water-cooled shroud inside the vacuum chamber

Laser engraving

Sarine's ATOM engraving with a 1 W, 638 nm, laser

Inductively-coupled plasma / Reactive ion etching

Ion Implantation (at the Hebrew University of Jerusalem)

The IMC-200 (IBS – Ion Beam Services) at the Brojde Center for Quantum Materials & Devices in the Hebrew University of Jerusalem complements the services offered by the IQDF at the Weizmann Institute of Science. It is currently the only user-facility in Israel for ion implantation. With energies ranging from 3 to 200 keV, doses 10¹¹-10¹⁸ at/cm² and a variety of gas sources (BF₃, SiF₄, PH₃, N₂, CO₂, He, Ar, H), the implanter allows for implantation of ion species relevant for the creation of color centers in diamond. For more details, please contact Ms. Yehudit Garcia at the Brojde Center.