Nanofabrication services are all maintained and continuously updated by a capable team of experts at the Nanofabrication Unit led by Ora Simcha Bitton Israel.
Photolithography
Laser Beam Lithography (Heidelberg)
Electron Beam Lithography (Raith Plus)
Atomic Layer Deposition (ALD)
Stylus Profilometer (Bruker)
Optical Profilometer (Zeta)
E-beam and Thermal evaporators (Odem, Edwards and in-house built) with temperature and height control
Wire Bonding Station
Sputtering
ICP Etching