Instrument Specification
- Decontaminate specimens and columns of SEMs and FIBs. The Evactron® CombiClean™ System combines an onboard vacuum cleaning chamber and external PRS (Plasma Radical Source) control in one unified system.
- Cleans SEM/TEM samples and SEM chambers from one desktop controller
- Stores samples and parts after cleaning
- Uses patented Safar TEM side loaders
- Designed as a complete cleaning solution, the Evactron® CombiClean System features an integrated vacuum chamber for desktop cleaning samples and vacuum parts, as well as an external Plasma Radical Source (PRS) for Evactron® in-situ cleaning of E-beam instruments by removing carbon contamination.
- The system monitors operation of either PRS unit, has internal memory, and is designed for routine operation with minimal operator training.
Location
Isaac Wolfson Building Room 013.2
Staff Contacts
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Dr. Nili Dezorella
Staff Scientist