Sigma 500 SEM (Zeiss)

Instrument Specification

The Zeiss Sigma 500 is a high resolution SEM. It is equipped with several detectors; the new generation E-T detector can filter out SE3 electrons, thus it collects mainly SE2 electrons and provide topographical information, the in-lens detector collects SE1 and provide high resolution surface information, the AsB provides material contrast.

Characteristics & Accessories

  • Accelerating voltage: 0.3 to 30 kV
  • In-Lens detector
  • AsB detector
  • EDS Bruker XFlash/60mm2