Supra 55 (Zeiss)

Instrument Specification

The Zeiss Supra 55 is a high-resolution SEM. It is equipped with several detectors; the E-T detector collects SE2 electrons and provides topographical information, the in-lens detector collects SE1 electrons and provides high-resolution surface information, the AsB detector collects BS electrons at voltages higher than 7kV and provide a composition and channeling contrast, the CL detector collects photons in the visible range. Mechanical characterization of materials can be done in-situ the Supra 55 using the Kleindiek nanomanipulation and force measurement system.

Characteristics & Accessories

  • Accelerating voltage: 0.2 to 30 kV
  • High efficiency in-lens SE detector
  • AsB – angle selective backscattered detector
  • CL – cathodoluminescence detector
  • Nano manipulation system for a nm precision movement (Kleindiek)
  • Force measurement system for measurements at the nN to µN scale (Kleindiek)