Instrument Specification
Our laboratory has three chemical hoods, each dedicated to a different process: Solvent, lithography, and acids.
In the hoods are hotplates, spinners, ultrasonic baths, nitrogen, D.I. water guns, and a cold development station for PMMA.
Location
Perlman building –1 floor, room 15 (Yellow room)
Staff Contacts
-
Leonid Tunik
מהנדס אלקטרוניקה
Training information
- Photolithography + E-beam hood: 1-hour training.
No prerequisites. A verbal explanation of all components and tools under the hood. Safety instructions. Material disposal instructions. Training with resist layer preparation on the spinner. Resist development. Glassware cleaning instructions. – Testing: Write a spin standard recipe using a lookup table for the resists process. - Acid hood: 0.5 hour training.
No prerequisites. Safety instructions. Overview of available etchants. A separate training on piranha preparation and use, if requested. QDR operation. Material disposal procedure.